YAMATAKE > PANEL MOUNT MASS FLOW CONTROLLER
MPC

• Full-automatic flow controller by incorporating the ultra-compact proportional valve.

• Not influenced of temperature and pressure fluctuations by integrating a Micro Flow sensor. #13;

•Just fit for replacing of conventional purge-meter!! Compact size, light weight, easy operation and reasonable price!! #13;

• Typical Specifications of MPC
1. Control range: 0 to 500ccm, 0 to2, 0 to 5, and 0 to 20LM
2. Gas types: Air, Nitrogen, Argon, Carbon dioxide (CO 2 )
3. Control range: 5 to 100%FS
4. Control accuracy: 2%FS
5. Operating differential range: 50 to 300kPa (7.5 to 45psi)
6. Pressure resistance: 0.5MPa (75psi)
7. Material of gas-contacting parts: Brass
8. Pipe connection method: PT1/8
9. Power supply: 24Vdc
10. Flow rate setting method: - Standard : Key operation - Option 1 : Analog voltage input/output - Option 2 : RS-485 communication (CPL)

• Typical Specifications of MPC
1. Multi set up : 4 SP can be set and changed by switch input
2. Gas type switching : standard compatible gas can be selected
3. Gas type setting : can set a conversion factor
4. Valve forced open / close
5. Slow start and slow control : can select control speed among 1 to 6 sec
6. Flow integration and integration pulse output
7. Valve drive output monitoring
8. "OK" lamp display and switch output
9. Event lamp display and switch output
10. Alarm lamp display and switch output
11. Automatic valve shut-off (selectable) - when the integration count up to setting value - when some alarm occurs.